Partners: Micro and Nanosystems DMAVT ETH ETH Zürich, Tannenstrasse 3, CLA H1, 8092 Zurich
Switzerland
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Expertise & Current Research Activities
In the Micro and Nanosystems Group, ETH Zurich, basic engineering research is dedicated to bringing new functionalities to micro and nanodevices by exploiting the properties of promising materials. The research projects are focused on the exploration of new methods and processes for the utilization of material properties for functional devices and future products. This incorporates research on new materials (including carbon nanotubes) for novel devices (including gas sensors), on modelling and simulation of device characteristics and on reproducible fabrication processes for system integration and innovations.
The MNS group has expertise in a variety of micro and nano fabrications, characterisation techniques including electrical characterisation of field effect transistors, Raman spectroscopy, transmission and scanning electron mictroscopies, AFM, gas measurements ...
For more information, please visit the following web sites:
http://www.micro.mavt.ethz.ch/research/index
The facility of Micro and Nanosystems Group, Department of Mechanical and Process Engineering, ETH Zurich including offices, group laboratories, FIRST–CLA clean room lab which is fully equipped for MEMS processing. Additionally FIRST–ETH and BRNC @ IBM Ruschlikon clean room facilities with many fabrication and characterization equipment & consumables, and microscopes at EMEZ are accessible for group members.
For more information, please visit the following web sites:
| CHIKKADI Kiran Lab.: Micro and Nanosystems Org.: ETH Zürich Country: Switzerland Tel. +41 446322538 - Fax +41 446321462 e-Mail kiranc@ethz.ch Web http://www.micro.mavt.ethz.ch
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| LIU Wei Lab.: Micro and Nanosystems Org.: ETH Zürich Country: Switzerland Tel. +41 44 632 64 48 - Fax +41 44 632 14 62 e-Mail wei.liu@micro.mavt.ethz.ch Web http://www.micro.mavt.ethz.ch
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| HALUSKA Miroslav Lab.: MNS Org.: ETH Zürich Country: Switzerland Tel. +41 44 6327640 - Fax +41 44 6321462 e-Mail haluska@micro.mavt.ethz.ch Web http://
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| HIEROLD Christofer Lab.: MNS Org.: ETH Zürich Country: Switzerland Tel. +41 44 6323143 - Fax +41 44 6321462 e-Mail christofer.hierold@micro.mavt.ethz.ch Web http://www.micro.mavt.ethz.ch/
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